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The Microwave Plasma Sources developed by AET are capable of generating plasma in the atmosphere at the frequency 2.45GHz. The use of microwave enables downsizing.

Compact Atmospheric Pressure Microwave Plasma Source

The Compact Atmospheric Pressure Microwave Plasma Source developed by AET features a hybrid-mode type resonator. Microwave power is easily fed through a coaxial cable and a connector. A waveguide or a matching section is not required. A target can easily be irradiated from any angle and position. Plasma generated in the atmosphere is a non-equilibrium plasma with a low gas temperature that does not cause thermal reactions. Therefore, this system is suitable for continuous processing in the atmosphere e.g. irradiating plasma to targets on a conveyor belt. It is also suitable for surface processing, coating, sterilization, and cleaning of various materials. It can be applied to medical and chemical processes and coming nano and biotechnologies as well.

Cavity Type Microwave Plasma Source APLC024-015
Operating Frequency
2.45 GH
Size
-
Plasma Spout Diameter
Φ20mm
Cooling
Water-cooling
Input Power
1kW max.
Flange / Connector
WR430
Gas
Argon gas and others
Pen Type Microwave Plasma Source  MiMi-P (Air-cooling Type)
Operating Frequency
2.45 GH
Size
Φ22 x 55mm
Plasma Spout Diameter
Φ2mm
Cooling
Air-cooling
Input Power
80 - 100W
Flange / Connector
N type
Gas
Argon gas and others
Pen Type Microwave Plasma Source  MiMi-P(Water-cooling Type)
Operating Frequency
2.45 GH
Size
-
Plasma Spout Diameter
Φ2mm
Cooling
Water-cooling
Input Power
80 - 300W
Flange / Connector
'7/16
Gas
Argon gas and others

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Contact

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TEL: +1-408-996-1760    FAX: +1-408-996-1962
info@aetassociates.com

Japan Headquarter

AET, Inc.
2-7-6 Kurigi, Asaoku, Kawasaki-city, Kanagawa, Japan
TEL: +81-44-980-0505    FAX: +81-44-980-1515
http://www.aetjapan.com/english

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